Method of producing a semiconductor device with through-substrate via covered by a solder ball

ABSTRACT

A semiconductor substrate is provided with a through-substrate via comprising a metallization and an opening. A solder ball is placed on the opening. A reflow of the solder ball is performed in such a way that the solder ball closes the through-substrate via and leaves a void in the through-substrate via.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a divisional application of U.S. patent applicationSer. No. 14/359,568, filed May 20, 2014, which is the national stage ofInternational Patent Application No. PCT/EP2012/072060, filed Nov. 7,2012, which claims the benefit of priority under 35 U.S.C. §119 ofEuropean Patent Application No. 11190389.4 filed on Nov. 23, 2011, allof which are hereby incorporated by reference in their entirety for allpurposes.

DESCRIPTION

The invention relates to a method of producing a semiconductor devicehaving an unfilled through-substrate via or interconnect provided with asolder ball.

BACKGROUND OF THE INVENTION

In three-dimensional integration of semiconductor devices, semiconductorsubstrates that are provided with structures of integrated circuits,like conductor tracks and electronic circuit components, are stacked andbonded. The conductors that are arranged on different substrates may beconnected by through-substrate vias, which are interconnects leadingthrough a substrate. In the case of a silicon substrate these vias areusually designated as through-silicon vias. The via hole in thesubstrate may be filled with the electrically conductive material orwith electrically conductive material and an additional dielectricmaterial.

WO 2009/013315 A2 describes a through-substrate via comprising anunfilled hole in the semiconductor substrate. A terminal contact areasurrounds the recess of the via, and a solder ball is deposited so thatit closes the recess. In this way a plurality of solder balls may beprovided for electric connection, using only a small area of thesubstrate surface. The diameter of the recess is specified in the rangefrom 50 μm to 500 μm. The solder ball can have a typical dimension of300 μm to 400 μm side length or diameter.

WO 2011/056374 A2 describes a coaxial through-silicon via.

US 2010/0171209 A1 describes a chip stack comprising gold-platedthrough-silicon vias, which are interconnected by solder balls providedwith a core of a higher melting point. The core, which is adapted toengage in a recess of the via hole, can be copper, tungsten, molybdenum,an insulator or a plastic material.

SUMMARY OF THE INVENTION

In one aspect of the method of producing a semiconductor device, asemiconductor substrate is provided with a through-substrate viacomprising an opening and a via metallization provided with an upperterminal layer located at a front side of the substrate. A metal pad isprovided separate from the upper terminal layer of the metallization,and a solder ball is placed on the opening of the through-substrate via.A reflow of the solder ball makes the solder ball electrically contactthe metal pad and close the through-substrate via, leaving a void in thethrough-substrate via.

In a further aspect of the method, a semiconductor substrate is providedwith an annular cavity extending from a front side of the substrate toan opposite rear side. Separate metallizations are applied on sidewallsof the annular cavity. A double through-substrate via is thus formed,leaving an opening of the annular cavity at the front side. A solderball is placed above the opening, and a reflow of the solder ball iseffected to form a void of the through-substrate via covered by thesolder ball. An electrically conductive pad, which is electricallyconnected to one of the metallizations and arranged at the front side ofthe substrate on a pillar formed by a portion of the substrate that issurrounded by the annular cavity, may be electrically contacted by thesolder ball.

The following is a detailed description of examples of the method ofproduction in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a cross-section of a semiconductor device comprising a viapad.

FIG. 2 shows a cross-section of a semiconductor device having a solderball that is insulated from the through-substrate via.

FIG. 3 shows a cross-section of a semiconductor device comprising asupporting layer.

FIG. 4 shows a cross-section of a semiconductor device comprising asolder ball with a core.

FIG. 5 shows a cross-section of a semiconductor device comprising anannular cavity.

FIG. 6 shows a cross-section of a semiconductor device comprising anannular cavity, an upper terminal layer connected both to a wiring andto the solder ball, and a central via pad.

FIG. 7 shows a cross-section of a semiconductor device comprising anannular cavity, an upper terminal layer that is only connected to thesolder ball, and a central via pad.

FIG. 8 shows a cross-section of a semiconductor device comprising anannular cavity with separate portions of the via metallization onsidewalls of the cavity.

FIG. 9 shows a cross-section of a further semiconductor device accordingto FIG. 8.

DETAILED DESCRIPTION

FIG. 1 shows a cross-section of a semiconductor device in a threedimensionally integrated arrangement. The semiconductor device comprisesa semiconductor substrate 10 with an intermetal dielectric 11 at thefront side 20. A circuitry may be arranged at the front side 20 and mayinclude active circuit components and a wiring 24 that is embedded inthe intermetal dielectric 11. The circuitry can be a CMOS circuit or anASIC, for example.

A through-substrate via 23 is formed in the substrate 10 by means of ametallization 111, which is arranged at a sidewall 12 of thethrough-substrate via 23 and is connected with an upper terminal layer22 and with a rear terminal layer 13 located opposite to the front side20 at a rear side 21 of the substrate 10. The upper terminal layer 22may be formed integrally with the metallization 111, or it may be aseparate top metallization, which is separately applied so that it is inelectrical contact with the metallization 111. The latter case isindicated by way of example in the layer structure shown in FIG. 1.

The rear terminal layer 13 may be arranged in a dielectric 25 at therear side 21 of the substrate 10. The dielectric 25 may be an oxide ofthe semiconductor material, for instance. At the rear side 21 of thesubstrate 10 a further circuitry or device structure may be disposed ina further layer structure of the substrate 10 or on a further substrate27 that is connected to the rear side 21 of the substrate 10. Thefurther circuitry or device structure may comprise a sensor, forinstance. The further substrate 27 may comprise a further wiring 28 in afurther intermetal dielectric 26. The rear terminal layer 13 may beconnected to the wiring 28, as shown in FIG. 1. The further substrate 27may comprise any circuitry or device structure, which is therefore notshown in detail.

The through-substrate via 23 is not filled with solid material, and avoid 101, which may be filled with air or another gas, is left in thevia. The via metallization 111 may be insulated from the substrate 10 byan insulator 110, which is applied at least on the sidewall 12 of thevia. The insulator 110 may be an oxide of the semiconductor material. Apassivation layer 112 may be applied on the via metallization 111.

A solder ball 100 is arranged on the through-substrate via 23 and closesthe void 101. If the sidewall 12 of the through-substrate via 23 iscylindrical and has a diameter of typically about 100 μm, the lateraldimension of the solder ball 100 may be typically about 280 μm. In thisexample a via pad 102 is located in the upper terminal layer 22. Thepassivation layer 112 is provided with an opening above the via pad 102,and the solder ball 100 is applied on the via pad 102 in such a mannerthat it makes an electrical contact with the via pad 102. A metal pad103 is present in an upper metal layer 104, which is separate from theupper terminal layer 22. The upper terminal layer 22 and the upper metallayer 104 may be insulated from one another by the intermetal dielectric11. The solder ball 100 electrically contacts the metal pad 103 and thusconnects the via pad 102 electrically to the metal pad 103. In thisfashion an electrical connection is provided between the wiring 24 andthe rear terminal layer 13. The electrical contacts of the solder ball100 may be effected by means of an under-bump metallization 109, whichmay be applied above the passivation layer 112.

The solder ball 100 may be used for a three dimensional integration witha further substrate 106, which comprises a contact island 107 formed asa metal layer. The further substrate 106 is arranged above the frontside 20 of the substrate 10 so that the contact island 107 faces thethrough-substrate via 23. The substrate 10 and the further substrate 106may be arranged at a distance of typically about 230 μm, for example.The solder ball 100 electrically contacts the contact island 107, whichmay be the terminal of a further via 108 of the further substrate 106 orthe terminal of a further wiring, for example. In the device accordingto FIG. 1 the solder ball 100 thus forms electrical connections betweenthe upper terminal layer 22, the metal pad 103 and the contact island107 of the further substrate 106.

The arrangement according to FIG. 1 can be produced by placing a solderball on the opening of the through-substrate via 23 and effecting areflow of the solder ball by increasing the temperature. After thereflow the solder ball 100 has the lenticular shape shown in FIG. 1,electrically contacts the pads 102, 103, and closes the void 101 withoutfilling it. Capillary forces that might draw the solder ball into theopening of the through-substrate via 23 are counteracted by air that istrapped in the void 101. Therefore the solder ball 100 is kept out ofthe void 101 except for a small lower bulge at most, as indicated inFIG. 1.

The use of a solder ball 100 which simultaneously caps thethrough-substrate via 23 and makes one or more electrical contactspermits a variable arrangement of interconnects between the circuitrieson both sides of the substrate 10 and between the substrates 10, 106.With the solder ball 100 placed above an opening of the via, thesubstrate area is used economically, and a great number of solder balls100, typically over a hundred, can easily be arranged above the surfaceof the substrate 10.

FIG. 2 shows a further example in a cross-section according to FIG. 1.The elements that are similar to the corresponding elements of thedevice according to FIG. 1 are designated with the same referencenumerals. The device according to FIG. 2 does not comprise a via pad inthe upper terminal layer 22. The upper terminal layer 22 is electricallyconnected with the wiring 24 shown on the right side in FIG. 2. Thesolder ball 100 electrically connects the metal pad 103 with the contactisland 107 of the further substrate 106. The passivation layer 112insulates the solder ball 100 from the upper terminal layer 22.

FIG. 3 shows a further example in a cross-section according to FIG. 1.The elements that are similar to the corresponding elements of thedevice according to FIG. 1 are designated with the same referencenumerals. The device according to FIG. 3 is similar to the deviceaccording to FIG. 1 except for a supporting layer 14 carrying the solderball 100. The lower surface 113 of the supporting layer 14 may beplanar. Instead, the lower surface 114 of the supporting layer 14 maybulge into the void 101. The supporting layer 14 may be formed using adry film like a resist film, for instance. An under-bump metallization109 may be applied under or above the supporting layer 14.

FIG. 3 shows an example of a device having the under-bump metallization109 applied under the supporting layer 14. If the supporting layer 14 isformed before the under-bump metallization 109 is applied, a section ofthe under-bump metallization 109 is arranged between the supportinglayer 14 and the solder ball 100. The supporting layer 14 may beprovided in the device according to FIG. 2 as well.

FIG. 4 shows a further example in a cross-section according to FIG. 1.The elements that are similar to the corresponding elements of thedevice according to FIG. 1 are designated with the same referencenumerals. The device according to FIG. 4 is similar to the deviceaccording to FIG. 1 except for a core 15 within the solder ball 100. Thecore 15 of the solder ball 100 has a higher melting point than the restof the solder ball 100 and helps to stabilize the solder ball 100 duringthe reflow process. The core 15 can be a polymer, for instance. If thereflow takes place at a temperature that is sufficiently high to meltthe solder ball 100 without melting the core 15, the spherical shape ofthe core of the solder ball 100 is essentially maintained and thealignment of the solder ball 100 with the through-substrate via 23 isfacilitated.

FIG. 5 shows a further example in a cross-section according to FIG. 1.The elements that are similar to the corresponding elements of thedevice according to FIG. 1 are designated with the same referencenumerals. The device according to FIG. 5 is similar to the deviceaccording to FIG. 1 except for the through-substrate via 23 having anannular cavity 18. The via metallization 111 is applied to an innersidewall 16 and to an outer sidewall 17 of the annular cavity 18 and isconnected with the upper terminal layer 22 and the rear terminal layer13 located at the rear side 21 of the substrate 10. The upper terminallayer 22 comprises a via pad 102, and the metal pad 103 is separate fromthe upper terminal layer 22. The solder ball 100 electrically contactsthe via pad 102 and the metal pad 103 through an under-bumpmetallization 109. By means of the solder ball 100 the via pad 102, themetal pad 103 and the contact island 107 of the further substrate 106are electrically connected. The annular cavity 18 may have the shape ofa cylinder barrel, and the inner sidewall 16 and the outer sidewall 17may be coaxial cylindrical surfaces. The portion of the substrate 10that is surrounded by the annular cavity 18 forms a kind of pillar 105,which serves to support the solder ball 100.

FIG. 6 shows a further example in a cross-section according to FIG. 5.The elements that are similar to the corresponding elements of thedevice according to FIG. 5 are designated with the same referencenumerals. The device according to FIG. 6 is similar to the deviceaccording to FIG. 5 except for the arrangement of the via pad. A centralupper terminal layer 29 comprising a central via pad 19 is located onthe pillar 105, the portion of the substrate 10 that is surrounded bythe annular cavity 18. The passivation layer 112 comprises an openingabove the central via pad 19, and the solder ball 100 electricallycontacts the central via pad 19. The passivation layer 112 comprises anopening above the via pad 102, and the solder ball 100 electricallycontacts the via pad 102. The upper terminal layer 22 also forms anupper metal layer 104, which is connected with the wiring 24.

The arrangement of the via metallization 111 both on the inner sidewall16, supplied with a neighboring electrical terminal, which is providedby the central via pad 19, and on the outer sidewall 17, also suppliedwith a neighboring electrical terminal, which is provided by the via pad102, has the advantage of a lower resistance compared to the devicesaccording to FIGS. 1 to 4.

FIG. 7 shows a further example in a cross-section according to FIG. 6.The elements that are similar to the corresponding elements of thedevice according to FIG. 6 are designated with the same referencenumerals. The device according to FIG. 7 is similar to the deviceaccording to FIG. 6 except for the upper metal layer 104 being separatefrom the upper terminal layer 22 comprising the via pad 102. Thereforethe solder ball 100 is not connected with the upper metal layer 104, butonly with the via pad 102 and the central via pad 19, thus connectingthe metallization 111 only with the contact island 107 of the furthersubstrate 106. The arrangement of the via metallization 111 on the innersidewall 16 and on the outer sidewall 17 and of respective contacts onthe upper terminal layer 22 and the central upper terminal layer 29 hasthe advantage of a lower resistance of the through-substrate via 23compared to the devices according to FIGS. 1 to 4.

FIG. 8 shows a further example in a cross-section according to FIG. 6.The elements that are similar to the corresponding elements of thedevice according to FIG. 6 are designated with the same referencenumerals. The device according to FIG. 8 is similar to the deviceaccording to FIG. 6 except for the presence of two separate viametallizations 111, 115 and the contact of the solder ball 100 on themetal pad 103 instead of the via pad 102. An upper terminal of thethrough-substrate via 23 is provided by the central via pad 19, and theupper terminal layer 22 is separately connected to a part of the wiring24, which is shown on the right side in FIG. 8. The metal pad 103 iselectrically connected with the central via pad 19 only via the solderball 100. The via metallization 111 that is arranged at the outersidewall 17 of the annular cavity 18 is insulated from the further viametallization 115 that is arranged at the inner sidewall 16 of theannular cavity 18. The metallization 111 that is arranged at the outersidewall 17 is electrically connected with the rear terminal layer 13.The further metallization 115 arranged at the inner sidewall 16 iselectrically connected with a central rear terminal layer 30, which isarranged at the rear side 21 opposite to the central upper terminallayer 29 at the bottom of the pillar 105. The metallization 111 that isarranged at the outer sidewall 17 is surrounded by dielectric materialof the insulator 110 and passivation layer 112 maintaining a floatingelectric potential if the metallization 111 is not electricallyconnected to the wiring 24 nor to the further wiring 28. In such adevice the metallization 111 may therefore be used as an electricalshield or screen of the through-substrate via 23, thus rendering athrough-substrate via 23 of improved isolation and low capacitance.

FIG. 9 shows a further example in a cross-section according to FIG. 8.The elements that are similar to the corresponding elements of thedevice according to FIG. 8 are designated with the same referencenumerals. The device according to FIG. 9 is similar to the deviceaccording to FIG. 8 except for an insulation between the solder ball 100and the upper terminal layer 22. An electrical connection between thevia metallization 111 that is arranged at the outer sidewall 17 of theannular cavity 18 and the wiring 24 is realized through the upperterminal layer 22. Because of the electrical connection to the wiring 24and/or further wiring 28, the via metallization 111 that is arranged atthe outer sidewall 17 may be maintained at a defined electric potential.If, instead, the metallization 111 is not electrically connected to thewiring 24 nor to the further wiring 28, the electric potential may bekept floating.

In the device according to FIG. 9, as in the preceding device accordingto FIG. 8, the via metallizations 111, 115 at the inner and outersidewalls 16, 17 can be used as separate conductors of a double,especially coaxial through-substrate via 23. The inner conductor of thedouble through-substrate via 23 is electrically connected to the solderball 100, by means of the central via pad 19, and to the central rearterminal layer 30. The outer conductor of the coaxial through-substratevia 23 may be electrically connected to the upper wiring 24 and tofurther conductors of the further wiring 28 and device structures of thefurther substrate 27, which are not shown in detail.

The devices according to FIGS. 5 to 9 have the advantage that theannular cavity 18 improves electrical properties of thethrough-substrate via 23 and that the portion of the substrate 10 thatis surrounded by the annular cavity 18 serves as a mechanical supportfor the solder ball 100.

In a method of producing the semiconductor device, a semiconductorsubstrate 10 is provided with a through-substrate via 23 which comprisesa via metallization 111 provided with an upper terminal layer 22. Thethrough-substrate via 23 has an opening, which is clad with themetallization 111, which is optionally covered by a passivation layer112. The upper terminal layer 22 of the via metallization 111 and ametal pad 103 of an upper metal layer 104 that is separate from theupper terminal layer 22 are applied at a front side 20 of the substrate10. To this end a metal layer may be applied so that it is electricallyconnected to the via metallization 111 in the opening of thethrough-substrate via 23. The metal layer is then structured into theupper terminal layer 22 and into a separate further section forming theupper metal layer 104 comprising the metal pad 103. A solder ball isplaced on the opening of the through-substrate via 23. Then a reflow ofthe solder ball is effected in such a way that the solder ball 100electrically contacts the metal pad 103 and covers the through-substratevia 23, leaving a void 101 in the through-substrate via 23.

When a through-substrate via is to be filled with electricallyconductive material, capillary forces serve to draw the solder ball intothe opening of the through-substrate via. This result can be avoided ifthe solder ball is chosen large enough to cover the whole opening of thethrough-substrate via 23. The air that is trapped in the void 101prevents the solder from filling the void 101 and allows at most a smalllower portion of the solder ball 100, if any, to bulge into the void101. Additionally a supporting layer 14 may be applied before the solderball 100 is placed. The supporting layer 14 may be a dry film,especially a dry film resist, which is structured photolithographicallyto cover the opening of the through-substrate via 23. The supportinglayer 14 stabilizes the solder ball 100 mechanically and prevents thesolder ball 100 from entering the void 101. Another possibility is theuse of a solder ball 100 that is provided with a spherical core 15 ofhigher melting point. During the reflow of the solder ball 100, the core15 is not melted and maintains its spherical shape, which is too largeto enter the opening of the through-substrate via 23.

In a variant of the method the reflow of the solder ball 100 is effectedin such a way that the solder ball 100 electrically contacts at leastone via pad 19, 102. For instance, a via pad 102 may be formed in theupper terminal layer 22, and the reflow of the solder ball 100 iseffected in such a way that the solder ball 100 electrically contactsthe via pad 102. The electrical contacts are improved if an under-bumpmetallization 109 is applied before the solder ball 100.

In a further variant of the method the through-substrate via 23 isformed with an annular cavity 18 in the substrate 10. The use of anannular cavity 18 facilitates the support of the solder ball 100 andprevents a filling of the through-substrate via 23. A central upperterminal layer 29 may be arranged on a pillar 105 formed by the portionof the substrate 10 that is surrounded by the annular cavity 18, and acentral via pad 19 may be provided in the central upper terminal layer29. The reflow of the solder ball 100 is effected in such a way that thesolder ball 100 electrically contacts the central via pad 19. In afurther variant of the method separate metallizations 111, 115 areapplied on sidewalls of the annular cavity 18, thereby forming a doublethrough-substrate via 23.

We claim:
 1. A method of producing a semiconductor device, comprising:providing a semiconductor substrate with a through-substrate viacomprising a metallization and an opening; arranging an upper terminallayer at a front side of the substrate, the upper terminal layer beingelectrically connected to the metallization; providing a metal pad thatis separate from the upper terminal layer; placing a solder ball on theopening of the through-substrate via; and effecting a reflow of thesolder ball in such a way that the solder ball electrically contacts themetal pad and closes the through-substrate via, the solder ball leavinga void in the through-substrate via.
 2. The method of claim 1, whereinthe solder ball is insulated from the upper terminal layer.
 3. Themethod of claim 1, wherein the solder ball electrically contacts theupper terminal layer.
 4. The method of one of claims 1 to 3, furthercomprising: forming a supporting layer using a dry film, the supportinglayer carrying the solder ball above the void.
 5. The method of one ofclaims 1 to 3, further comprising: forming a core of the solder ball,the core having a higher melting point than the rest of the solder ball;and performing the reflow of the solder ball at a temperature at whichthe solder ball is melted without melting the core.
 6. A method ofproducing a semiconductor device, comprising: providing a semiconductorsubstrate with an annular cavity extending from a front side of thesubstrate to an opposite rear side; applying a metallization in theannular cavity, thereby forming a through-substrate via and leaving anopening of the annular cavity at the front side; placing a solder ballabove the opening; and effecting a reflow of the solder ball, therebyforming a void of the through-substrate via, the void being covered bythe solder ball.
 7. The method of claim 6, further comprising: arrangingan electrically conductive pad at the front side of the substrate on apillar formed by a portion of the substrate that is surrounded by theannular cavity; electrically connecting the pad to the metallization;and effecting the reflow of the solder ball in such a way that thesolder ball electrically contacts the pad.
 8. The method of claim 6 or7, further comprising: forming the annular cavity having inner and outersidewalls; and arranging the metallization on the inner sidewall and afurther metallization on the outer sidewall.
 9. The method of claim 8,wherein the metallization and the further metallization are formedseparate from one another, so that a double through-substrate via isprovided.
 10. The method of claim 8, further comprising: arranging anupper terminal layer at a front side of the substrate, the upperterminal layer being electrically connected to the furthermetallization; and effecting the reflow in such a way that the solderball electrically contacts the upper terminal layer.
 11. The method ofclaim 10, further comprising: providing a metal pad that is separatefrom the upper terminal layer; and effecting the reflow in such a waythat the solder ball electrically contacts the metal pad.
 12. The methodof claim 8, further comprising: arranging an upper terminal layer at afront side of the substrate, the upper terminal layer being electricallyconnected to the further metallization; providing a metal pad that isseparate from the upper terminal layer; and effecting the reflow in sucha way that the solder ball electrically contacts the metal pad and isinsulated from the upper terminal layer.